| Size | 6"(150mm) | 8"(200mm) | 12"(300mm) | 18"(450mm) |
| Inside diameter | φ194±0.5 | φ250±0.5 | φ350+0/-0.5 | φ506+0/-0.5 |
| Outside diameter | φ228±0.5 | φ296±0.5 | φ400+0/-0.5 | φ575+0/-0.5 |
| Hardness | Hrc≥50 | |||
| Thickness | 1.2±0.1 | 1.2±0.1 | 1.5±0.1 | 2.0±0.1 |
| Flatness | ≤0.2 | |||
| Material | SUS 420 J2 | |||
| Surface | available with hairline, glossy or special finish according to your requirements. | |||
Wafer Frame/Wafer Ring
Wafer Frame (Wafer Ring)
Wafer Frame Wafer Frame – Standard, made of SUS 420 J2 material, made according to SEMI‘s dimensional specifications, available with hairline, glossy or special finish according to your requirements. We can also provide laser engraving of wafer frames upon your request.
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Wafer Frame Cleaning
Wafer Frame Cleaning
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Precision Laser Engraving
Precision Laser Engraving
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Wafer carrier/Wafer Box
Wafer Storage Box
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Frame Cassette/Frame Box
Frame Cassette
