| 4″ PFA Cassette
Capacity: 25 pcs Size: 142.2(L) x 125.4(W) x 114.3(H)mm |
5″ PFA Cassette
Capacity: 25 pcs Size: 152.4(L) x 142.8(W) x 146(H)mm |
5.2″ PFA Cassette
Capacity: 25 pcs Size: 163(L) x 142.3(W) x 151(H)mm |
| 6″ PFA Cassette
Capacity: 25 pcs Size: 143.3(L) x 177.8(W) x 171.4(H)mm |
8″ PFA Cassette(high version) / 8″ PFA Cassette(short version) capacity: 25 pcs
Size: High version: 203(L) x 233(W) x 218(H)mm Short version: 234(L) x 220(W) x 159(H)mm |
12″ PFA Cassette
Capacity: 13 pcs Size: 350(L) x 180(W) x 320(H)mm |
進入化學酸、鹼蝕刻製程中，鐵氟龍晶舟盒需要靠手把夾持
